Features
Guide from specimen exchange to automatic observation “Specimen Exchange Navi”
1. Follow the Navi to set specimen
2. Prepare for observation during evacuation
3. Start observation automatically
*1 The stage navigation system (SNS) is optional.
*2 SNSLS is optional. It can be used with SNS concurrently.
*3 The chamber scope (CS) is optional.
Magnify the optical image, transition to SEM image “Zeromag”
The Zeromag function simplifies navigation providing a seamless transition from optical* to SEM image.
The SEM, optical image and holder graphic are all linked for a global view of analysis locations.
Embedded EDS for Real-Time elemental composition during observation* “Live Analysis”
Live Analysis is a function which displays the EDS spectrum or element maps in Real-Time during image observation. This function can support searching and provide an alert for target elements.
Automation for enhanced productivity “Simple SEM”
Simple SEM automates image collection at multiple locations, conditions and magnifications.
Tools for speed
Stage with high position accuracy. Relocate analysis positions with accuracy.
Standard 60 mm2 large diameter EDS*
For fast analysis*
Fast analysis
The 60 mm2 sensor size EDS equipped as standard with JSM-IT210 can obtain the same quality in much less time than with smaller area detectors. Multi-point analysis can be also performed more efficiently.
Application to heat-sensitive specimens
A small area EDS detector requires a large current for analysis. Heat-sensitive specimens are damaged due to beam irradiation, which negatively affects an elemental map.
The 60 mm2 EDS collects an element map with lower probe current.
This enables fast analysis while minimizing damage caused by heat.
Fast, clear element maps
60 mm2 EDS collects a clear element map even by one minute measurement.
