Features
The JSM-IT800 incorporates our “In-lens Schottky Plus field emission electron gun” for high resolution imaging to fast elemental mapping, and an innovative electron optical control system “Neo Engine”, as well as a system of seamless GUI “SEM Center” for fast elemental mapping with a fully embedded JEOL energy dispersive X-ray spectrometer (EDS), as a common platform.
The JSM-IT800 allows for the replacement of the objective lens of the SEM as a module, offering different versions to satisfy various users requirements. With the JSM-IT800, five versions are available with different objective lenses: a hybrid lens version (HL), which is a general-purpose FE-SEM; a super hybrid lens version (SHL/SHLs, two versions with different functions), which enables higher resolution observation and analysis; and the newly-developed semi-in-lens version (i/is, two versions with different functions), which is suited for the observation of semiconductor devices.
Furthermore, the JSM-IT800 can also be equipped with a new Scintillator Backscattered Electron Detector (SBED) and a Versatile Backscattered Electron Detector (VBED). The SBED enables the acquisition of images with high responsiveness and produces sharp material contrast even at a low accelerating voltage, while the VBED can help obtain images of 3D, topography and material contrasts. Thus, the JSM-IT800 can help users to obtain information that was not obtainable and to solve problems in measurement.
In-Lens Schottky Plus Field Emission Election Gun (FEG)
The integrated In-Lens Schottky Plus and low aberration condenser lens achieves high beam brightness. Ample probe current (100nA@5kV) is available even at low accelerating voltage. This allows the user to perform high resolution observation, high speed elemental mapping, EBSD analysis and Soft X-ray analysis with minimal adjustment of SEM parameters.
Neo Engine (New Electron Optical Engine)
The nex-generation electron optical control system, a masterpiece of JEOL’s electron optics technologies is incorporated. Stable observation is possible while adjusting various microscope parameters. Furthermore, the system features enhanced auto-functions for additional ease of use.
AFS・ACB
Before auto focus adjustment After auto focus adjustment
Specimen: Sn nanoparticles on carbon
Accelerating voltage: 15 kV, WD: 2mm, Observation mode: BD, Detector: UED, Magnification: x200,000
SEM Center・EDS integration
Full integration of microscope GUI “SEM Center” and JEOL EDS has brought about the next generation of SEM utilization. Moreover, the JSM-IT800 incorporates Smile Navi (optional) that can assist a beginner with how to operate an SEM, LIVE-AI (artificial intelligence) filter Live-AI (Live Image Visual Enhancer-AI:LIVE-AI)（optional) providing easy viewing of live image, and SMILE VIEW™ Lab for fast report generation.
SMILENAVI *Option
SMILENAVI is an assistant tool designed for beginners to allow smooth basic SEM operations. When the operator clicks on the appropriate button as indicated by the SMILENAVI flowchart, the SEM GUI is linked to the click operation for operator guidance. Since the GUI displays operation steps and button locations, operators will be able to operate the SEM without using SMILENAVI.
LIVE-AI filter (Live Image Visual Enhancer-AI:LIVE-AI)
Utilizing the AI (artificial intelligence) capability, LIVE-AI filter is incorporated for a higher quality of live images. Unlike image integration processing, this new filter can display a seamless moving live image with no residual image. This unique feature is very effective for quickly searching observation areas, focusing, and stigmator adjustment.
Comparison of live images
Specimen: Ant exoskeleton, Accelerating voltage: 0.5 kV, Detector: SED
Specimen: Iron rust, Accelerating voltage: 1 kV, Detector: SED
Hybrid Lens version (HL；Hybrid Lens) /
Super Hybrid Lens version (SHL；Super Hybrid Lens) /
Semi-In-Lens version
The JSM-IT800 series offers a choice of objective lenses to suit the user’s purpose.
The HL version and SHL version(including SHLs version) are equipped with an electromagnetic/electrostatic field superposed objective lens developed from the versatile out-lens.
The high resolution observation and analysis of a wide variety of specimens from metals to nano materials are possible. It is especially useful for the observation of magnetic materials and analysis such as EBSD measurement.
The i version and is version are equipped with a semi-in lens. They are optimal for high-resolution observation and analysis of tilted and cross-sectional samples, which are necessary for failure analysis of semiconductor devices.
In addition, it is useful for potential contrast observation using an upper in-lens detector (UID).
UHD；Upper Hybrid Detector
UHD, a new detector incorporated in SHL version objective lens is highly efficient in detection electrons arising from the specimen, enabling acquisition of images with enhanced S/N ratio.
UHD(Upper Hybrid Detector)
SHL observation example
Specimen: Aluminium Oxide particles
The amazing step-structure on the surface of particles can be observed. Single nm steps are clearly observed on the particle surface.
※ Acquired by the SHL version.
Specimen: Cross section of IC-chip (surface-etching, osmium coating)
The SE image can be obtained by using the UHD; and the BSE image can be obtained by using the UED.
HL observation example
i observation example
Secondary electron (SE) image of photocatalyst particles
This image is obtained using the UED detector of the JSM-IT800(i).
Specimen courtesy of Project Professor Kazunari Domen, The University of Tokyo, Japan.
This photocatalyst reveals the quantum efficiency of the water-splitting reaction close to100%. The high resolution SE image clearly shows that the cocatalyst particles with a size less than 10 nm are preferentially deposited on the {100} crystal facets of cubic particles for promoting the hydrogen and oxygen evolution reactions.
Reference
T. Takata et. al., “Photocatalytic water splitting with a quantum efficiency of almost unity,” Nature , 581, 411-414, 2020.
SRAM component Compositional contrast image / Voltage contrast image / Topographic contrast image
Observation conditions: landing voltage 1 kV, WD 8 mm, SIL mode and the signals are obtained by the detectors UED, UID and SED simultaneously
New Backscattered Electron Detectors
Scintillator backscattered electron detector (SBED) has excellent sensitivity and is useful in obtaining material contrast image at low acceleration voltage. Versatile backscattered electron detector (VBED) enables acquisition of characteristic images such as 3D and surface topography based on divided detection element shape.
SBED (Scintillator backscattered electron detector)
Use of scintillator for detector has improved detection sensitivity and responsiveness compared to semiconductor element.
VBED Images (Versatile Backscattered Electron Detector)
Semiconductor detection element is divided into 5 segments, making it possible to select the signal suitable for the observation purpose.
Angle selection
Specimen: Scintillator, Accelerating Voltage: 3.0kV
Depending on the acquisition angle of backscattered electrons, the composition information is enhanced by the inner segment, while the topography information is enhanced by the outer segments. Moreover, comparing the contrast of fluorescent body beneath the AI deposition film, the different depth related information can be potentially investigated.
3D reconstruction
Specimen: On-chip micro lens of CCD element, Accelerating Voltage: 7.0kV
Reconstruction of a 3D image is possible using 2D images obtained from four segments.
