Clear visibility promotes new discovery

Nowadays, not only resolution and analytical performance on the nanometer order, but also throughput in data acquisition are considered important. The newly born JSM-IT710HR is the fourth-generation model of JEOL’s HR* series, which is based on the theme of “SEM that allows anyone to easily take high-resolution images.
The JSM-IT710HR makes users want to pursue beyond what has been seen, due to ease of operation with enhanced automatic functions and improved observation performance from a new detector.

PRODUCT VIDEO

New functionality

Automatic Observation：Simple SEM/EDS

Simple SEM function enables automatic measurements by registering multiple conditions at once. Simple
This improves the efficiency of routine work.

Live 3D: constructs 3D image on the spot

Imaging is possible at a low magnification with a little distortion, due to the out-lens objective lens.

Live 3D image

New Low Vacuum Hybrid Secondary Electron Detector (LHSE) ※Optional function

The LHSED, a new low-vacuum detector, enables observation while switching between images containing light emission information and topographic images.

LHSED Features

• Improved quality of low vacuum secondary electron live image
• Acquisition of light emission information
• Switching between topographic and light emission information images

Schottky FE electron gun stability has been enhanced more than 4 times compared to the previous models

Automatic Beam Adjustment

JSM-IT710HR does not require complicated manual adjustment and provides automatic adjustment from axis alignment to astigmatism correction and focusing.

Secondary Electron Detection System

Secondary electron detector (SED)

Specimen: Feather of peacock^*
*Specimen image: Courtesy of Hinotonton Zoo (Hamura Zoo)

Low vacuum secondary electron detector
(LVSED/LHSED)

Specimen: cellulose microfiber

Both High Resolution and Large Current

The Schottky field emission gun used in the JSM-IT710HR enables high-resolution observation and analysis because the electron gun is integrated with the condenser lens to create large currents while maintaining a small probe.

Backscattered Electron Detection System

The new multi-segmented backscattered electron detector acquires backscattered electron images from four directions at once so that a simple 3D image can be created and displayed live, in real-time.

Every Analysis Starts with Zeromag

Zeromag’s optical image simplifies navigation.
SEM images can be linked to optical images for easy observation, analysis, and automated measurements.

EDS Integration

JEOL manufactures and sells not only SEMs but also EDS.
Fully embedded EDS with SEM for simplified workflow, operation and data management.

Wiring pattern

Using the low-vacuum function to observe a wide area of the wiring pattern surface

Specimen: wiring pattern surface, magnification: ×200 (left), ×300 (right), vacuum pressure: 70 Pa, accelerating voltage: 15 kV

SRAM

High-resolution EDS map

Specimen: SRAM cross section prepared using CP
Magnification: ×10,000 (top), ×50,000 (bottom)
Accelerating voltage: 5 kV (SEM), 7 kV (EDS)

Al bonding pad

By acquiring both low-vacuum secondary electron images and backscattered electron images at the same time, the topographic information and composition information of a wide specimen surface area can be acquired.

Steel

Applicable features of JSM-IT710HR: optical system suitable for EBSD analysis (Schottky field emission gun and out-lens objective lens)

Energy and Ceramics

Applicable featur es of JSM-IT710HR: analysis capabilities and low-vacuum function

Perovskite solar cell substrate

High-accuracy analysis of nano-scale layers in the solar cell substrate

Ceramic substrate (Si₃N₄)

Low-vacuum function enables elemental analysis of non-conductive specimens.

Soft Material and Life Science

Applicable features of JSM-IT710HR: low accelerating voltage, low-vacuum functio n, and ultra-low magnification observation

ABS resin

Even multiple images observed at a magnification of tens of thousands can be acquired with high accuracy and stable brightness.

Gelatin

High-brightness, high-resolution secondary electron image

Artificial vessel

Observing a biological specimen on a slide glass from low to high magnification