Features
Basic Unit platform
- Cold-FEG is standard.
- Installation of Cs corrector is possible.
- High speed and high sensitivity stage. Three times faster than the existing motor drive and fine movement control similar to the piezo drive control is available.
Easy Operation
- Intuitive operation is available even for inexperienced operator of TEM
- Minimizes the operations that are using the operation panel and the final image can be obtained while clicking the buttons on the screen in order.
- Focus adjustment can be performed by mouse operation.
- Integration with Gatan camera is possible.
- Automatic microscope tuning functions
- Autofocus, automatic astigmatism, automatic specimen height adjustment, automatic beam centering, and automatic orientation, etc.
Automatic data acquisition function
- The recipe software “Automation Center” enable automatic data acquisition
- TEM image, STEM image, elemental mapping by EDS.
- Several specimens on a grid can be handled.
Linkage with critical dimension measurement software
- Magnification calibration is available for each magnification set on the TEM side.
- Automatic critical dimension measurement is available for data acquired by more than one JEM-ACE200F.
Remote operation
- Next room operation
- Remote operation and simultaneous observation at more than one location (subject to network environment)
- Enables observation while discussing with multiple business locations.
Improvement of environmental resistance by column enclosure
- Contributes to controlling the impact from changes of noise, air flow, and room temperature.
- Further soundproofing measures are possible by attaching acoustic material to the interior walls.
From Analysis instruments to Analysis tool
– Automated STEM/TEM analysis will help improve processes and stably help improve quality control –
